High-Purity Components for Semiconductor Equipment
Quartz, silicon, ceramic and SiC components developed around your drawing, equipment conditions and acceptance criteria — from feasibility review to customer qualification.
Quartz, silicon, ceramic and SiC development options
Evaluation against customer-controlled technical inputs
DFM, prototype and first-article planning
New parts, refurbishment and spare-part support
Search by common part name, then narrow by material, semiconductor process, equipment module or substrate size.
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Repair and spares
Complex quartz highlights
Actual finished-part photos. Final suitability is reviewed against drawings and process conditions.
Oxidation · Diffusion · Annealing
View product familyCVD · Wafer handling · Process support
View product familySPM · Wet clean · Recirculation
View product family
Handling · Transfer · Support fixture
View product familySend a drawing or sample for feasibility review and a controlled development plan.
Semiconductor applications
Oxidation · Diffusion · Annealing
Quartz or SiC wafer boats, process tubes, gas-delivery and thermal-support components.
Wafer size, furnace type, temperature profile, atmosphere and cleanliness criteria.
CVD · LPCVD
Process tubes, chambers, injectors, baffles, carriers and custom quartz assemblies.
Film process, gases, pressure, temperature, interface and cleaning specification.
Cleaning · Wet etch · Resist strip
Quartz tanks, overflow and circulation vessels, flow-control and support components.
Chemistry, concentration, temperature, capacity, circulation and leak requirements.
Plasma etch · Chamber support
Quartz or silicon rings, windows, baffles, shields and ceramic positioning parts.
Chamber, plasma chemistry, wafer size, material grade and qualification standard.
Application review
Quartz chambers, gas-delivery, flow-control, window and carrier components.
Material system, equipment, gases, temperature, coatings and particle criteria.
Repair · Refurbishment · Spare support
Feasibility review for serviceable quartz parts and agreed spare-part programs.
Part condition, drawing revision, failure mode, acceptance and demand profile.
Why WONIK
WONIK Semicon combines component engineering, integrated production and lifecycle services to help fabs and equipment partners evaluate alternative sources for critical hard-brittle components.
Engineering evaluation based on a customer drawing, reference sample or agreed specification.
Cold machining, flame working, cleaning and inspection managed through one production flow.
Material, inspection, cleaning and packaging criteria aligned with the agreed acceptance specification.
Repair, refurbishment and buffer-stock programs designed to reduce cost and unplanned downtime.
Facility and equipment figures: 2026 company introduction. Project capabilities are subject to technical review.
Quality infrastructure
From material documentation and dimensional inspection to cleaning and final packaging, the route is defined around the part, application and agreed acceptance criteria.
WONIK · Our factory
WONIK Semicon Co., Ltd. has companies in Wuxi and Lianyungang. Our factory brings together CNC machining, quartz flame working, dimensional inspection and cleaning to support semiconductor component production.
Machining centres support cutting, grinding and polishing of quartz components.
Glass lathes and flame-working stations support forming and welding of quartz parts.
Vision measurement equipment supports dimensional checks against component drawings.
Automated cleaning equipment supports the cleaning stage before final packing.
Factory photographs: WONIK company introduction, 2026, pages 5–8. Processing routes, cleanliness requirements and acceptance criteria are confirmed for each project.
A clear qualification path
A controlled route from technical inputs through engineering, prototype production and qualification.
Sample or drawing, material, equipment and process requirements.
Measure, model and agree critical dimensions and acceptance criteria.
Produce a prototype through the agreed manufacturing route.
Inspect, clean and package for customer evaluation, then plan repeat supply.
Technical insights
Process knowledge
A practical overview of where fused quartz components are used in oxidation, diffusion, annealing and LPCVD equipment, and which application details matter during part review.
Read articleBuyer guide
The drawings, operating conditions and acceptance details that help suppliers evaluate custom quartz process tubes, wafer carriers, tanks and gas-path components.
Read articleStart a technical conversation
For a faster feasibility review, prepare the equipment family, part drawing or sample, material grade, critical tolerances, cleaning requirement and estimated annual demand.
WONIK Semicon Co., Ltd. · Wuxi / Lianyungang. Choose the contact channel for your business region.
