Wet-process vessels
Quartz Wet Process Tanks
Custom tanks and vessels reviewed around chemistry, circulation, capacity, thermal load and leak criteria.
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WONIKWuxi · LianyungangEnquire
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Semiconductor applications
Wet processing
Cleaning · Wet etch · Resist strip
Quartz vessels and support structures assessed against the actual liquid chemistry and wet-bench arrangement.
Process overview
Where the components fit
Wet processing uses liquid chemistry for operations such as cleaning, selective material removal and photoresist stripping. Cleaning can recur between manufacturing steps to remove unwanted material and prepare the wafer surface for subsequent processing.
Quartz tanks, overflow vessels and supporting structures are candidates only where the chemistry and operating conditions are compatible. WONIK reviews tank capacity, circulation, connections, structural support and leak requirements from the customer specification.
- 01
Identify the chemistry
The liquid composition, concentration and working temperature are essential inputs to material selection; a process name alone is insufficient.
- 02
Define containment and circulation
The drawing establishes the working volume, overflow arrangement, inlet and outlet connections, and support interfaces.
- 03
Agree the acceptance criteria
Dimensional inspection, cleanliness and leak requirements are defined for the proposed vessel and its intended installation.
Conceptual application guide—not an equipment operating procedure or a manufacturing recipe.
From process to part
Related component families
Representative product families for technical review. Listing a component here does not establish compatibility with a specific tool or process.
Before quotation
Define your application.
Hydrofluoric acid (HF) attacks fused quartz. Quartz tanks must not be assumed suitable for HF-containing processes. Other chemistries also require review of concentration, temperature and exposure; alkaline contamination can create problems during later heating. Final material selection and qualification remain application-specific.
Request a technical review- Complete chemistry, concentration and expected exposure
- Working temperature, capacity and thermal load
- Overflow, circulation, inlet and outlet arrangement
- Support, mounting and mating-interface drawing
- Leak, cleanliness and customer qualification requirements